Stage Equipped with Single Actuator for Nano-Positioning in Large Travel Range

摘要

Precision positioning is an essential basis for precision mechanical engineering, such as positioning for precision manufacture, or positioning control of robot arms. Due to the increasing demand for precision in the submicrometer range, precision positioning plays an important role for precision manufacture. In this investigation a nano-positioning stage is developed. With the positioning system, high precision positioning and large displacement range can be achieved simultaneously. Advantages of this developed system are positioning driver with single actuator, uncomplicated mechanical structure, low cost and lower hardware requirement. A laser interferometer is used for displacement measurements of the translation stage, and a mini-autocollimator serves as angle sensor for tilt angle measurements. The tilt angle can be minimized with piezo translators and control operations. By the displacement measurements of laser interferometer, the feedback control is performed for positioning in large travel range. High precision positioning in nanometer-order can be achieved with the positioning system. With this development, individual sensor modules are self-accomplished and dominating technologies for the complete nano-positioning system are established.