Linear Actuator System with 1-Angstrom Closed-Loop Control Resolution and 50-milimeter Travel Range

摘要

We have designed and tested a novel linear actuator system with 1-angstrom closed-loop control resolution and 50-mm travel range. There are two major ultra precision motion control techniques that have been applied to this actuator: A novel laser Doppler encoder system with multiple-reflection optics. A specially designed high-stiffness weak-link mechanism with stacked thin metal sheets having sub-angstrom driving sensitivity with excellent stability. In this paper, we present the system design and test results of this linear actuator. Applications of this new actuator system are also discussed.