DIODE LASER BONDING OF PLANAR MICROFLUIDIC DEVICES, MOEMS, BIOMEMS, DIAGNOSTIC CHIPS MICROARRAYS

摘要

The assembly of plastic microfluidic devices, MOEMS and microarrays requiring high positioning andrnwelding accuracy in the micrometer range, has been successfully achieved using a new technology based onrnlaser transmission welding combined with a photolithographic mask technique. This paper reviews a laserrnassembly platform for the joining of microfluidic plastic parts with its main related process characteristicsrnand its potential for low-cost and high volume manufacturing. The system consists of a of diode laser with arnmask and an automated alignment function to generate micro welding seams with freely definablerngeometries. A fully automated mask alignment system with a resolution of < 2 μm and a precise, noncontactrnenergy input allows a fast welding of micro structured plastic parts with high reproducibility andrnexcellent welding quality.