Materials Research Laboratory, University of California, Santa Barbara, CA 93106;
Materials Research Laboratory, University of California, Santa Barbara, CA 93106;
Materials Research Laboratory, University of California, Santa Barbara, CA 93106;
Materials Research Laboratory, University of California, Santa Barbara, CA 93106,Department of Chemical Engineering, University of California, Santa Barbara, CA 93106;
Intel Corporation, Hillsboro, OR 97124;
Intel Corporation, Hillsboro, OR 97124;
Intel Corporation, Hillsboro, OR 97124;
Materials Research Laboratory, University of California, Santa Barbara, CA 93106,Department of Chemical Engineering, University of California, Santa Barbara, CA 93106;
Self-Consistent Field Theory (SCFT); graphoepitaxy; directed self-assembly; hole shrink problem; VIA lithography; contact holes;
机译:圆柱孔约束中的定向自组装机制
机译:定向自组装(DSA)接触孔收缩的缺陷研究
机译:定向自组装(DSA)接触孔收缩的缺陷研究
机译:圆柱约束中定向自组装的场论模拟:布置和整流方面
机译:用于直接自组装的嵌段共聚物共混物的理论表征
机译:圆柱约束中硬质球流动驱动悬浮的微观结构:动力学密度泛函理论和蒙特卡洛研究
机译:孔缩问题:米科尔科共聚物定向自组装的自洽场理论