首页> 外文会议>Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II >Hard X-ray multilayer coated astronomical mirrors by e-beam deposition
【24h】

Hard X-ray multilayer coated astronomical mirrors by e-beam deposition

机译:通过电子束沉积镀硬X射线多层镀膜天文镜

获取原文
获取原文并翻译 | 示例

摘要

A number of X-ray astronomical missions of near future (Constellation-X, XEUS, Simbol-X) will make use of hard X-rays (10-100 keV) optics with broad-band multilayer coatings. A possible technique under development is based on an extension of the already tested replication of a coated mandrel by e-beam deposition and nickel electroforming already successfully used for the soft (0.1 - 10 keV) X-ray mirrors of the Beppo-SAX, XMM, JET-X/Swift missions. In this case graded multilayers are deposited and replicated from the mandrel replicated instead of a single layer. The roughness reduction in order to improve the coating reflectivity could be achieved by an ion assistance during the e-beam deposition. The e-beam deposition with ion assistance is a technique that allows to reach comparable (if not better) smoothness levels with respect to other methods (e.g. ion sputtering), taking the advantage of a stress mitigation between the layers and of a further improvement in reflectivity due to the low density of the e-beam evaporated Carbon, which is used as bilayer spacer. In this paper we discuss the adopted deposition technique and its implementation: we present topographic (AFM) tests and X-ray reflectivity tests performed on preliminary samples.
机译:不久的将来,许多X射线天文任务(星座X,XEUS,Simbol-X)将使用具有宽带多层涂层的硬X射线(10-100 keV)光学器件。一项正在开发的可能技术基于通过电子束沉积和已经成功用于Beppo-SAX,XMM的软(0.1-10 keV)X射线反射镜的镍电铸对已测试的涂层芯棒复制进行扩展的技术,JET-X / Swift任务。在这种情况下,沉积的渐变多层材料是从心轴复制品中复制出来的,而不是从单层复制而来。为了改善涂层反射率,可以通过在电子束沉积期间进行离子辅助来降低粗糙度。利用离子辅助技术进行电子束沉积是一种技术,该技术可利用层之间的应力减轻和进一步改进的优点,实现与其他方法(例如离子溅射)相比可比的(如果不是更好的话)平滑度级别。由于电子束蒸发的碳的密度低,因此反射率很高,该碳用作双层隔离层。在本文中,我们讨论了采用的沉积技术及其实现:我们介绍了对初始样品进行的地形(AFM)测试和X射线反射率测试。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号