Molecular bases for the interaction between novolaks and diazonaphthoquinone photoactive compounds

摘要

Abstract: An investigation of the molecular characteristics of DNQ-PACs both in isolation and in combination with polymer matrices using the techniques of solid state magic angle sample spinning Fourier transform (FT) nuclear magnetic resonance (NMR) spectroscopy and FT-Raman spectroscopy has been initiated. These investigations necessitated a rather fundamental look at the spectroscopic signatures of DNQ's in various environments. Two dimensional NMR techniques have been used to unambiguously assign carbon-13 and proton NMR spectra of the 2,1,5-DNQ moiety in solution. The nitrogen-15 NMR spectrum of 2,1,5-DNQ has also been assigned. While preliminary solid state NMR and FT-Raman spectra have demonstrated that these techniques can be used to monitor the effect of matrices on DNQ/PACs at the molecular level, isotopic labelling will be required to fully understand the nature of the interactions. The correlation of molecular-based information with macroscopic resist performance should lead to the development of new improved resists. !9