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Studies of dissolution inhibition mechanism of DNQ-novolak resist (II): effect of extended ortho-ortho bond in novolak

机译:DNQ-novolak抗蚀剂的溶解抑制机理研究(II):扩展的邻-邻键在酚醛清漆中的作用

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Abstract: A p-cresol trimer sequence was incorporated into a polymeric chain of novolak by copolymerization with m-cresol of a reactive precursor which was prepared by attaching two units of m-cresol to the terminal ortho positions of p-cresol trimer. The resulting novolak was characterized by $+13$/C NMR and FTIR in an attempt to correlate novolak structure with dissolution inhibition function based on physicochemical analysis of molecular interactions between novolak and DNQ-PAC in solid films.!
机译:摘要:通过与反应性前体的间甲酚共聚,将对甲酚三聚体序列结合到酚醛清漆的聚合物链中,该反应性前体是通过将两个单元间甲酚连接到对甲酚三聚体的末端邻位而制得的。最终的酚醛清漆的特征是通过$ + 13 $ / C NMR和FTIR进行的,旨在基于酚醛清漆与DNQ-PAC在固体膜中的分子相互作用的物理化学分析,将酚醛清漆的结构与溶解抑制功能相关联!

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