ACCURATE DETERMINATION OF MULTIPLE POINTS - MICRO FEATURES MEASURED WITH COMPUTED TOMOGRAPHY MICROPROBES AND LASER

摘要

During the last years computed tomography (CT) and tactile-optical sensors have been integrated as additional sensors for coordinate measuring machines. To reach traceable results measuring on real work pieces, the presentation shows the achievable accuracy by comparing the results of CT to a traceable tactile-optical sensor. Especially dimensional measurements of multiple points on micro features will be addressed.