A novel porous silicon-based multilayer dielectric-grating structures for diffraction-based sensing

摘要

Porous silicon material and device has attracted more attention for use as biochemical optical sensors. In this paper, A novel porous silicon-based multilayer dielectric-grating structures by adding high-reflectivity porous silicon stacks between the substrate and grating was fabricated, and the porous silicon grating height was set to be about 200 nm, the grating period was 4 μm, the air filling factor was 50%. A new better method of preparing this porous silicon-based multilayer dielectric-grating structures have also been employed.