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Cu Annealing Using Various Concentrations of Hydrogen in a Flexible Hot-Wall Thermal Processing Tool

机译：在柔性热壁热加工工具中使用各种浓度的氢气进行铜退火

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来源
《Advanced Semiconductor Manufacturing Conference, 2007 IEEE/SEMI》|2007年|P.263-267|共5页
会议地点 StresaItaly
作者
Ouaknine; M.; Ueda; T.; Fukada; T.; Malik; I.I.; Woo Sik Yoo; Guerrieri; S.; Marangon; T.;
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关键词
annealing; coating techniques; copper; hot working; hydrogen; integrated circuit interconnections; wafer-scale integration; Cu; copper annealing; electro-chemical deposition; flexible hot-wall thermal processing tool; hydrogen concentration; wafer processing;

机译：退火;涂层技术；铜;热工作氢;集成电路互连；晶圆级集成；铜铜退火电化学沉积灵活的热壁热处理工具；氢浓度晶圆加工;

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1. Structural, Magnetic Properties, and Hall Carrier Concentrations of (Co,Cu):ZnO Thin Films-The Role of Cu Ions and Annealing in Hydrogen [J] . Hao Wang, Hanbin Wang, Qiong He, Journal of the American Ceramic Society . 2012,第7期

机译：（Co，Cu）：ZnO薄膜的结构，磁性和霍尔载流子浓度-氢中铜离子和退火的作用
2. Altering the nucleation of thermally annealed hydrogenated amorphous silicon with laser processing [J] . M. S. Dabney, P. A. Parilla, L. M. Gedvilas, Applied Physicsletters . 2009,第25期

机译：通过激光加工改变热退火氢化非晶硅的形核
3. Effect of annealing atmosphere on quaternary chalcogenide-based counter electrodes in dye-sensitized solar cell performance: synthesis of Cu₂FeSnS₄ and Cu₂CdSnS₄ nanoparticles by thermal decomposition process [J] . Krishnaiah Mokurala, Sudhanshu Mallick RSC Advances . 2017,第25期

机译：退火气氛对季铵盐基反电极在染料敏化太阳能电池中的影响：Cu _{2 FeSnS _{4 和Cu _{2 CdSnS的合成热分解法制备_{4 纳米粒子}}}}
4. Cu Annealing Using Various Concentrations of Hydrogen in a Flexible Hot-Wall Thermal Processing Tool [C] . Ouaknine, Michel, Ueda, . 2007

机译：在柔性热壁热加工工具中使用各种浓度的氢气进行铜退火
5. Analyzing the thermal annealing behavior of laser thermal processed silicon [D] . Kuryliw, Erik Adam 2003

机译：分析激光热处理硅的热退火行为
6. Enhanced Photoluminescence of Hydrogenated Amorphous Silicon Carbide Thin Films by Means of a Fast Thermal Annealing Process [O] . Israel Vivaldo, Roberto C. Ambrosio, Roberto López, 2020

机译：通过快速热退火工艺增强氢化非晶碳化硅薄膜的光致发光
7. Effect of annealing atmosphere on quaternary chalcogenide-based counter electrodes in dye-sensitized solar cell performance: synthesis of Cu2FeSnS4 and Cu2CdSnS4 nanoparticles by thermal decomposition process(vol 7, pg 15139, 2017) [O] . MOKURALA, K, MALLICK, S 2017

机译：退火气氛对季铵盐基对电极在染料敏化太阳能电池中的影响：通过热分解法合成Cu2FeSnS4和Cu2CdSnS4纳米粒子（第7卷，第15139页，2017年）
8. Reduction of Hydrogen Cyanide Concentrations and Acute Inhalation Toxicity from Flexible Polyurethane Foam Combustion Products by the Addition of Copper Compounds. Part 4. Effects of Combustion Conditions and Scaling on the Generation of Hydrogen Cyanide [R] . Levin, B. C., Braun, E., Paabo, M., 1992

机译：通过添加铜化合物降低柔性聚氨酯泡沫燃烧产物的氰化氢浓度和急性吸入毒性。第4部分燃烧条件和结垢对氰化氢生成的影响

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