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Linear Mode Photon Counting From Visible To MWIR With HgCdTe Avalanche Photodiode Focal Plane Arrays

机译:HgCdTe雪崩光电二极管焦平面阵列从可见光到中波红外的线性模式光子计数

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Results of characterization data on linear mode photon counting (LMPC) HgCdTe electron-initiated avalanche photodiode (e-APD) focal plane arrays (FPA) are presented that reveal an improved understanding and the growing maturity of the technology. The first successful 2×8 LMPC FPA was fabricated in 2010 [1]. Since then a process validation lot of 2×8 arrays was fabricated. Five arrays from this lot were characterized that replicated the previous 2×8 LMPC array performance. In addition, it was unambiguously verified that readout integrated circuit (ROIC) glow was responsible for most of the false event rate (FER) of the 2010 array. The application of a single layer metal blocking layer between the ROIC and the detector array and optimization of the ROIC biases reduced the FER by an order of magnitude. Photon detection efficiencies (PDEs) of greater than 50% were routinely demonstrated across 5 arrays, with one array reaching a PDE of 70%. High resolution pixel-surface spot scans were performed and the junction diameters of the diodes were measured. The junction diameter was decreased from 31 μm to 25 urn resulting in a 2× increase in E-APD gain from 470 on the 2010 array to 1100 on one of the 2013 FPAs. Mean single photon signal to noise ratios of >12 were demonstrated at excess noise factors of 1.2-1.3. NASA Goddard Space Flight Center (GSFC) performed measurements on the delivered FPA that verified the PDE and FER data.
机译:线性模式光子计数(LMPC)HgCdTe电子引发的雪崩光电二极管(e-APD)焦平面阵列(FPA)上的表征数据结果得到了揭示,这表明人们对该技术有了更深入的了解,并且日趋成熟。 2010年成功制造出首个成功的2×8 LMPC FPA [1]。从那时起,制造了许多2×8阵列的工艺验证。该批次中的五个阵列的特征是复制了以前的2×8 LMPC阵列性能。此外,毫无疑问地验证了读出集成电路(ROIC)的辉光是2010年阵列错误事件发生率(FER)的主要原因。在ROIC和检测器阵列之间应用单层金属阻挡层以及ROIC偏置的优化将FER降低了一个数量级。常规证明,在5个阵列中光子检测效率(PDE)大于50%,其中一个阵列的PDE达到70%。进行了高分辨率的像素表面点扫描,并测量了二极管的结直径。结直径从31μm减小到25 um,导致E-APD增益从2010年阵列的470增长到2013年FPA之一的1100的2倍。在1.2-1.3的超额噪声因子下,平均单光子信噪比大于12。 NASA戈达德太空飞行中心(GSFC)对已交付的FPA进行了测量,以验证PDE和FER数据。

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