Computations involved in IBF process and introduction of the software IBFCAM

摘要

Ion beam figuring (IBF) is a deterministic and powerful optical figuring process to high-end optics. To perform an IBF process, some computations are inevitably involved, such as to extract beam removal functions, to calculate dwell times, to determine scan velocities and to recognize the removal rate. These computations influence the process time and the process result of the IBF. In this paper, the computations involved in an IBF process are introduced and the software IBFCAM, which is developed by us to implement all the computations, is also introduced. IBFCAM is well designed and it cosists of 6 modules, including IBFCAM.Read, IBFCAM.Removal, IBFCAM.BRF, IBFCAM.Time, IBFCAM.Code and IBFCAM.PostAnalysis. Each module deal with a relatively independent function. Particlularly, The IBFCAM.PostAnalysis is newly added to IBFCAM in version 5.0. It is used to recognize the actual the removal rate, especilly useful to a new material or a new optics. This is very useful to a new optics, especilly to a new material.