Abstract: We have developed a zonal deformable mirror that controls the wavefront of a high average power visible laser beam used for isotope separation. The mirror corrects greater than five waves of astigmatism, power, or random second order aberrations to 1/20 wave rms. Sufficient resolution is achieved to correct third order aberrations as well. A monolithic glass substrate with dimensions 77 mm $MUL 121 mm $MUL 10 mm is used in this design. Twenty-five actuator attachment members are incorporated into the shape of the back side of the substrate. Piezoelectric translators (PZTs) attached in a rectangular array deform the continuous substrate to the proper conjugate shape. The PZTs are attached through flexures designed to be compressionally stiff and laterally soft. In this way the intended PZT displacement is transmitted efficiently to the substrate while isolating both the mirror and the PZTs from undesirable lateral loads. Mirror parameters were determined from elastic mechanical beam approximations. Finite element analysis was used to verify performance prior to prototyping. A Hartmann sensor controls the mirror in a closed loop adaptive system. The system description is covered in a companion paper. This paper describes the mirror design and presents performance data. !4
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机译：摘要：我们已经开发了一种可变形的纬向镜，该镜可控制用于同位素分离的高平均功率可见激光束的波阵面。镜子将大于五次的像散，功率或随机二阶像差波校正为1/20波均方根。还可以获得足够的分辨率来校正三阶像差。在该设计中使用尺寸为77 mm $ MUL 121 mm $ MUL 10 mm的整体玻璃基板。将二十五个致动器附接构件结合到基板的背面的形状中。以矩形阵列连接的压电转换器（PZT）将连续基板变形为适当的共轭形状。 PZT通过设计成抗压刚度和侧向柔软度的挠曲件连接。这样，预期的PZT位移会有效地传递到基板，同时使反光镜和PZT均与不良的横向载荷隔离。镜面参数由弹性机械束近似值确定。在进行原型设计之前，使用有限元分析来验证性能。哈特曼传感器在闭环自适应系统中控制反射镜。系统说明包含在随附的论文中。本文介绍了镜子的设计并提供了性能数据。 ！4
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