Cd1-xZnxTe alloy films grown by r.f.sputtering

摘要

Cd1-xZnxTe alloy films with 1.6 and 1.7 eV band gaps were deposited on glass as the absorbed layer in solar cells by RF magnetron sputtering from Cd0.9Zn0.1Te crystals target grown by the Modified Vertical Bridgman method. High-quality polycrystalline films were obtained. The influences of the deposition temperature on polycrystalline Cd1-xZnxTe films have been studied using X-ray diffraction (XRD), energy dispersive X-ray (EDX), step profilometer, atomic force microscopy (AFM) and ultraviolet spectrophotometer. We found that the degree of crystallinity and the grain size of the deposited films changed regularly with the increase of deposition temperatures. The optical absorption coefficient a decreased monotonically with the increase of deposition temperature.