STANDARDISATION FOR MICROSYSTEMS TECHNOLOGY: THE WAYFORWARD

摘要

This paper discusses the work of the MEMSTAND project, "Standardisation for Microsystems: The Way Forward". MEMSTAND is funded as an Accompanying Measure under the European Commission's Fifth Framework Information Societies Technology Programme. The project addresses the potential problem of the lack of standard methods for the design, manufacture and testing of microsystems. Routes to standardisation of design, manufacture and metrology of microsystems are being explored via a number of initiatives reported here. These include a survey, an international workshop, and a roadmap that will summarise work carried out to date in this field and formulate recommendations for future actions. The outputs from MEMSTAND include publication of a book of workshop abstracts, submission of a report to the European Commission, publication of a selection of papers in the scientific literature, a report of the findings of the work to the relevant standards committees and ultimately a standardisation roadmap.