MINIATURE HERMETICALLY SEALED HOUSING FOR PRESSURE SENSORS

摘要

The aim of the current study was to reduce both the size as well as productionrncosts of current designs whilst retaining the general architectural principles and find arnsolution lending itself to batch processing. The designs result in a new method forrnconnecting the sensor to the outside being necessary. This can be achieved by thin film onrna steel or using ceramic technology such as LTCC. Special attention is paid to the flexiblernmembranes. Small membranes with high corrugations made of nickel are separated in arnstandard galvanic process on the housing.