ACHIEVING FAST MOTIONS IN SEMICONDUCTOR MANUFACTURINGMACHINERY

摘要

Many manufacturing devices must execute motions as quickly as possible tornachieve profitable high-volume production. This paper develops shaped torque inputsrnthat minimize move time while avoiding overshoot and oscillation. These inputs arernapplied to an actual semiconductor manufacturing machine, utilizing both feedforwardrnand feedback strategies for minimizing the degree of vibration generated during fastrnmotions.