DISPLACEMENT MEASUREMENT, NONLINEARITY, NOISE, AND THERMAL STABILITY

摘要

Converter is considered more suitable for measurement the greater its linearity is.rnHowever, purely linear converters are not available. New method has been created usingrnnon-linearity in the base of displacement measurement. It allows one to increasernmeasurement range significantly: the measurement range of conventional capacitancernconverter is ～10~(-5) m, and in the proposed method measurement range using the samernconverter is about 10~(-3) m. Comparing devices with photoelectric converters, thernmeasurement range is increased from ～1.6~*10~(-3) m up to 40~*10~(-3) m. Simultaneous solvingrnnon-linearity, noise, and stability problems reflects synergetic aspect of the method.