首页> 外文会议>7th Conference amp; Exhibition of the European Ceramic Society Pt.1, Sep 9-13, 2001, Brugge, Belgium >Pulsed laser deposition of diamond like carbon (DLC) and zirconia-tougened alumina (ZTA) on steels and PMMA
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Pulsed laser deposition of diamond like carbon (DLC) and zirconia-tougened alumina (ZTA) on steels and PMMA

机译:在钢和PMMA上的脉冲激光沉积类金刚石碳(DLC)和氧化锆氧化铝(ZTA)

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Pulsed laser deposition (PLD) has been carried out with KrF-excimer laser radiation (λ_L=248 nm,τ_L= 25 ns). The investigations are focused on the adherence of the diamond like carbon (DLC) and the zirconia-tougened alumina (ZTA) on diverse substrates such as: tool steels (1.3202 and 1.3207), stainless steels (1.4301 and 1.4305) and PMMA with different pre-treatments. The analytical techniques used to determine the structural and chemical characteristics of the films are Raman spectroscopy, X-ray photoelectron spectroscopy, optical microscopy and scanning electron microscopy (SEM). The hardness and the elastic modulus of the films are measured by nano-indentation. The tribological characteristics of the DLC and ZTA films are also investigated and compared with those Al_2O_3 films deposited by PLD.
机译:脉冲激光沉积(PLD)已通过KrF-准分子激光辐射(λ_L= 248 nm,τ_L= 25 ns)进行。研究集中于类金刚石碳(DLC)和氧化锆增韧氧化铝(ZTA)在各种基材上的附着力,例如:工具钢(1.3202和1.3207),不锈钢(1.4301和1.4305)和具有不同预加工性能的PMMA治疗。用于确定膜的结构和化学特性的分析技术是拉曼光谱,X射线光电子能谱,光学显微镜和扫描电子显微镜(SEM)。膜的硬度和弹性模量通过纳米压痕测量。还研究了DLC和ZTA薄膜的摩擦学特性,并将其与PLD沉积的Al_2O_3薄膜进行了比较。

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