Advanced Permeation Properties of Solvent-free Multi-LayerEncapsulation of thin films on Ethylene Terephthalate(PET)

摘要

In this paper, the inorganic multi-layerrnencapsulation of thin film was newly adopted tornprotect the organic layer from moisture and oxygen.rnUsing the electron beam, Sputter, inorganic multilayerrnthin-film encapsulation was deposited onto thernEthylene Terephthalate(PET) and their interfacernproperties between inorganic and organic layer wererninvestigated. In this investigation, the SiON SiO2 andrnparylene layer showed the most suitable properties.rnUnder these conditions, the water vapor transmissionrnrate (WVTR) for PET can be reduced from level ofrn0.57 g/m2/day (bare substrate) to 1*10-5 g/m2/dayrnafter application of a SiON and SiO2 layer. Thesernresults indicate that the PET/SiO2/SiON/Parylenernbarrier coatings have high potential for flexiblernorganic light-emitting diode(OLED) applications.