Evaluation of LCD device parameters and rubbed surface of Polyimideby means of renormalized spectroscopic ellipsometry

摘要

Evaluating method of the device parameters ofrnliquid crystal display (LCD) by means of thernrenormalized transmission spectroscopic ellipsometryrnis demonstrated. Dielectric and elastic constant,rnthreshold voltage, pretilt angle, cell gap andrnAnchoring strength coefficients can be evaluated fromrnthe measurement of ellipsometric parametersrnmeasured by the symmetrically oblique incidencerntransmission ellipsometry (SOITE). Furthermore,rnrapid evaluating method for rubbed polyimide film isrnalso demonstrated.