Fabrication of Co Nanohole Arrays with high Aspect Ratios Using Two-Step Replication of Anodic Porous Alumina

摘要

A highly ordered metal Co nanohole arrays with straight through holes of high aspect ratio were fabricated using two-steps replication procedure which is composed of subsequent frist-replica and second-replica processes starting from anodic alumina porous membrane as template. SEM and EDS were applied to characterize the structure of polymethyl methacrylate(PMMA) negative usd as a structure intermedia and the nanohole arrays obtained in the end. Results from SEM demonstrate that the PMMA negative and the nanohole arrays are of uniform size and be straight and parallel to each other, which shows a quite good retention of the hole arrangement of anodic porous alumina in the process. Result from EDS indicates the high purity of the membrane. Result from VSM show that iron magnetic property of Co nanohole arrays is quite different from that of bulk metal Co.