A Novel Rinsing Tank Concept to Save Dl Water Using an Internal Recirculation Flow: 'Circle Stream Rinser'

摘要

A new rinsing process is proposed based on conclusions obtained by simulations. It consists of a combination of piston flows and internal top-to-bottom recycling steps which decreases the DI water consumption and increases the rinsing efficiency. This novel concept re-using the DI water in situ in the rinsing tank is demonstrated using an industrial bath recently proposed on the market.