Application of Stretchable Membrane with Ferrite Flaky Fillers in Inductive Displacement Sensor

摘要

In this paper implementation of composite membrane with LTCC (Low Temperature Co-fired Ceramic)ferrite flaky fillers in realization of inductive displacement sensor is presented. Membrane was realized by placing a silicone layer in mold, followed by adding ferrite flaky fillers in active area of membrane. Final step in membrane realization was addition of top layer of silicone. Sensor was realized by employing 3D printing technology and it was made of four main parts: bottom part with spiral inductor, spacer in the middle and stretchable membranes covered with top part.