With the presented technique of a cross transport unit to handle micro parts by using a linear direct drive and a vacuum pipette a new technology for micro formers was introduced. The results regarding precision and velocity of the total application are well satisfying. The linear direct drive enables a production rate of at least 240 parts per minute (transport distance 25 mm, position tolerance 2μm). In consideration of experimentally determined parameters like sucking distance and precision the cycle time can be reduced further. Shaped pipettes (radius or 90°V-shape) reach more than twice of the sucking force compared to non-shaped. Parts can be sucked from a distance of 0.55 mm and are positioned to the pipette with a precision of +-5.3 μm. The reliability analysis showed that the handling process allows the micropart to be transported even at high accelerations (10 g).
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