Accuracy-influencing Factors Analysis and Error Resources Identification In Ultra Precision Machining

摘要

The complexity of the structures of ultra-precision machine tools and the machining processes governs that the factors that influence the machining accuracy cannot be all clearly determined, especially the stochastic ones. In this paper, the error sources of the ultra precision machine tool that contribute to the final machining errors were systematically analysed and determined, and ARV models of the time series of the cutting process of the machine tools were adopted to evaluated the influence of these error sources, which can provide orientation to minimizing and compensating the errors induced by these error sources.