Ordered textured zinc oxide films with anodic aluminum oxide template assistant

摘要

In the present study,we introduce a method for preparing ordered textured aluminum doped zinc oxide (AZO) films by template-assisted sputtering deposition.Templates were fabricated by oxidizing Aluminum foil in phosphoric acid via a two step anodization process.ZnO films were deposited on anodic aluminum template subsequently by magnetron sputtering.Indicated by atomic force microscopy images,the surface morphology of this AZO/AAO composite film inherits the hemispherical-like structure of AAO template to a certain extent,and develops a uniformly dispersed W-like textured surface morphology.Sputtering 500-nm-thick AZO,the composite film obtained a mean haze value of 28％ from 400 to 1100 nm,while average total transmittance maintains about 80％.These experimental results show that introducing AAO templates as assistant can obtain ordered surface morphology of AZO films to induce effective light-trapping efficiency,especially in the long wavelength range.