首页> 外文会议>2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems amp; Eurosensors XXXIII >Microfabricated Air-Microfluidics Virtual Impactor with Groove-Based Envelope-Flow Particle Focusing System
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Microfabricated Air-Microfluidics Virtual Impactor with Groove-Based Envelope-Flow Particle Focusing System

机译:带有基于凹槽的包络流粒子聚焦系统的微型空气微流控虚拟撞击器

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摘要

In this paper we present the design, modeling, fabrication and experimental results of an air-microfluidic inertial particle size-separator called a virtual impactor (VI), combined with a novel groove-induced envelope (GRIP) flow particulate matter (PM) focusing system, resulting in improve collection efficiency, i.e. selectivity to a target size of airborne particulates. Results present an important improvement in the functionality of resonator-based air-microfluidic MEMS PM sensors.
机译:在本文中,我们介绍了一种称为虚拟撞击器(VI)的空气-微流体惯性粒度分离器的设计,建模,制造和实验结果,并结合了新型的沟槽诱导包膜(GRIP)流动颗粒物(PM)聚焦系统,从而提高了收集效率,即对空气中颗粒物目标尺寸的选择性。结果表明,在基于谐振器的空气微流体MEMS PM传感器的功能上有重要的改进。

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