On-Chip Parallel Architecture Mems FTIR Spectrometers Enabling High Spectral Resolution for Environmental Gas Analysis

摘要

Fourier transform infrared spectrometer is of great importance in field of gas sensing. Miniaturizing such spectrometers using MEMS technology opens the door for low cost and compact spectrometers. Such miniaturization helps in delivering spectrometers to end-customers opening more applications. However, scaling down the spectrometers limits its selectivity or the spectrometer resolution. For Michelson interferometers, this is due to the limited travel range of moving mirror. Mitigating such limit can be achieved using the parallel concept making use of the small size of the MEMS interferometer. Two interferometers monolithically were integrated on the same chip, while the scan range of the mirrors are complementary using the same actuator range. Gas sensing measurement was conducted to show the enhanced selectivity of such novel architecture.