Highly Sensitive AlN Contour-Mode Resonator-Based Pressure Sensor for In-Line Monitoring of Chemical Reactions

摘要

In this study, we have developed a new type of highly sensitive pressure sensor based on a microelectro mechanical system (MEMS) aluminum nitride (AlN) contour-mode resonator (CMR), which is experimentally verified by measuring pressure changes within the range of 0 kPa to 200 kPa. The CMR-based pressure sensor, offering enhanced linearity, achieves an improved sensitivity of 16.51 Hz/hPa, making it suitable for performing quantitative in-line monitoring of gaseous species production reactions, e.g. in real time detection of a hydrogen peroxide decomposition reaction.