首页> 外文会议>202nd Meeting of the Electrochemical Society, May 12-17, 2002, Philadelphia, PA >BORON-DOPED CVD DIAMOND PLANAR FILM AS AN ELECTRODE FOR ELECTROCHEMICAL SENSING
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BORON-DOPED CVD DIAMOND PLANAR FILM AS AN ELECTRODE FOR ELECTROCHEMICAL SENSING

机译:掺硼CVD金刚石平面膜作为电化学感应电极

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The unique electrochemical properties of diamond such as a large working potential window, low background current and prolonged stability make it attractive for applications in electroanalysis. High quality and conductive diamond films are known to exhibit active voltammetric response without the need for surface pretreatment. This paper reports on the design, fabrication and characterization of boron-doped CVD diamond film for electrochemical sensing. Two types of planar boron-doped diamond electrodes were achieved by plasma enhanced chemical vapor deposition (PECVD) using in situ gas phase doping method. The first utilizes the "as grown" diamond surface with randomly microstructured topology as a planar diamond electrode. The second utilizes a micro patterning technique to produce a well-defined pyramidal diamond tips array with good uniformity control. The fabrication process for the electrodes is described. The diamond microelectrodes were evaluated electrochemically for the detection of Fe(CN)_6(3-/4-) using cyclic voltammetry. The results suggest that diamond electrodes can be used in electrochemical sensing application.
机译:金刚石独特的电化学特性,例如大的工作电势窗口,低的背景电流和长期的稳定性,使其在电分析中具有吸引力。已知高质量且导电的金刚石膜无需表面预处理即可显示出主动伏安响应。本文报道了用于电化学传感的掺硼CVD金刚石膜的设计,制造和表征。使用原位气相掺杂法通过等离子体增强化学气相沉积(PECVD)实现了两种类型的平面掺硼金刚石电极。第一种利用具有随机微结构拓扑的“生长中”金刚石表面作为平面金刚石电极。第二种利用微图案化技术来产生定义良好的金字塔形金刚石尖端阵列,并具有良好的均匀性控制。描述了电极的制造过程。使用循环伏安法对金刚石微电极进行电化学评估,以检测Fe(CN)_6(3- / 4-)。结果表明金刚石电极可用于电化学传感应用。

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