CuO and CuO/TiO2-y Thin-Film Gas Sensors of H2 and NO2

摘要

Thin films of CuO and CuO/TiO2 were deposited by medium frequency magnetron sputtering on a variety of substrates for the purposes of gas sensing applications. Film characterization was performed by means of X-ray diffraction, XRD, scanning electron microscopy, SEM, and optical spectrophotometry. Gas sensing measurements were carried out in NO2 and H2 atmosphere at constant temperature chosen within the range of 200–400°C. Improvement in sensor response has been observed for CuO/TiO2 thin film heterostructures.