A comprehensive survey on the research headway of piezoresistive diaphragms for micro electromechanical applications

摘要

Microelectromechanical devices using diaphragms have been developing fast in recent years. The working phenomena of these are based upon the deflection caused due to applied pressure upon it due to various factors. On the basis of how pressure is being applied upon the diaphragm we get different responses with huge parameter variations that help us to find a suitable application and also helps us to optimize the various parameters by changing the shape, material, thickness, etc., so that the best performing device can be achieved. The ease of fabrication using conventional microfabrication techniques provide development of MEMS diaphragms in diverse applications like energy harvesting, pressure, vapour, strain sensing, microfluidics, biosensors and acoustics. This literature survey collection in based on the various applications of piezoresistive MEMS diaphragms.