A miniaturized force sensor based on hair-like flexible magnetized cylinders deposited over a giant magnetoresistive sensor

摘要

The detection of low-magnitude forces (under 1mN) is essential in applications that require either a very high sensitivity and resolution acquisition (e.g. detection of microfluidic flows) [1] or very high reliability and control (e.g. biomedical or humanoid robotics) [2], [3].