Improvement of Stress Induced Reliability Shift in AMR Sensor

摘要

When the Moore's Law goes to the limit, “Industry 4.0” intelligent industry will rise. The development of sensors is the most important application of IOT. Single-chip three-axis Anisotropic Magneto-Resistive (AMR) sensor technology requires the integration of the ASIC (Application-Specific Integrated Circuit) with sensor itself. To have stable yields for production, its biggest challenge will be the reliability verification.