A CMOS 16k microelectrode array as docking platform for autonomous microsystems

摘要

A microelectrode array (MEA) system based on an active pixel architecture is presented, which has been fabricated in 180nm CMOS technology, featuring 16384 active pixels (36×36×m2). Each pixel consists of 4 electrodes (each 12×12μm2): two (connected together) for actuating and two for differential sensing. The pixels are arranged in a square grid of 4.6×4.6mm2. Schematic and layout of the MEA were generated by a SKILL script. The MEA is designed as a docking platform for charging and communicating with autonomous microsystems, called lablets, as well as combinatorial electrochemistry. Experiments in aqueous electrolyte solutions confirm the functionality of the MEA to fulfill the requirements of a flexible configuration of the pixels and the possibility of charging microsystems in a solution.