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RF MEMS tunable band reject filter using metamaterials

机译:使用超材料的RF MEMS可调带阻滤波器

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摘要

Tuneable band reject filter is a very critical component of electronic warfare. The design is of such a filter using MEMS technology presented on CPW transmission line on silicon substrate using Complementary Split Ring Resonators (CSRRs) and RF MEMS variable capacitor, enabling compatibility with planar IC technology. The CSRRs are etched on both the signal line and ground planes of the CPW. Tunability of the band reject filter is achieved by putting the MEMS bridge in either up or down state. Through electrostatic actuation of the RF-MEMS switched capacitor, the electrical characteristics of the filter is modified, so that its resonance frequency can be tuned. The rejection of stop bands are around −20.19dB for down state around the centre frequency 35.32GHz and −18.29dB for up state around the centre frequency 38.80GHz.
机译:可调谐带阻滤波器是电子战中非常关键的组成部分。这种滤波器的设计是使用MEMS技术的滤波器,该滤波器在硅基板上的CPW传输线上使用互补的开环谐振器(CSRR)和RF MEMS可变电容器,可与平面IC技术兼容。 CSRR在CPW的信号线和接地层上均被蚀刻。带阻滤波器的可调性是通过将MEMS桥置于上或下状态来实现的。通过RF-MEMS开关电容器的静电驱动,可以改变滤波器的电气特性,从而可以调节其谐振频率。对于中心频率35.32GHz附近的下降状态,阻带的抑制约为-20.19dB,对于中心频率38.80GHz附近的上升状态,阻带的抑制值为-18.29dB。

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