Internal Model Sliding Mode Controller for Mass flow system based on sensed flow rate

摘要

An Internal Model based Sliding Mode Controller is proposed to compensate the slow response due to thermal sensor for variations in flow rate of gas. The Mass flow system is approximated to a third order dynamic model. Simulation is performed for Control based on Estimated flow rate using Proportional Integral Controller and Control based on Sensed flow rate using RST and Internal Model Sliding Mode Controller. Performance of the proposed Internal Model Sliding Mode Controller is compared with Proportional Integral and RST controllers using the performance measure RMSE (Root Mean Square Error). The proposed Internal model Sliding Mode controller yields excellent robustness and the simulation results show the feasibility of the proposed scheme.