Low-loss and high extinction ratio 40 Gbit/s optical modulator with self-aligned fabrication process

摘要

Experimental results of a silicon modulator based on carrier depletion in a PIPIN diode integrated in a Mach-Zehnder interferometer, are presented. At 40 Gbit/s, the modulator exhibits 6.6 dB extinction ratio and 6 dB optical loss.