The effect of electron assisted RF discharge plasma on the surface propertis of PET film

摘要

Flexible displays, flexible paper related electronic products are important development tendency in micro-electronics industry. At present, increase the adhesive strength between flexible organic substrates and ITO film quickly and efficiently and ensure the reliability of the adhesive between them is a burning question. By pulse modulate technology, we investigated the mechanism and effects of secondary electron assisted RF pulse discharge plasma, and developed a stable and uniform secondary electron assisted RF pulse plasma system which can operate at a wide process window. We did depth research in the effect of discharge power, and Ar/O2 ratio on the concentration of active species and the properties of secondary electron, and explored the relationship between the parameters and surface modification effect. Hydrophilicity of the PET film surfaces was studied by contact angle measurements. Atomic force microscopy (AFM) was used to study the changes in surface feature of the polymer surface due to plasma treatment. The chemical composition of the polymer films was analyzed by X-ray photoelectron spectroscopy (XPS). The adhesion strengths of the Au layers on the plasma-treated PET surfaces were studied by T-peel strength test.