Automation of a crystal growth system by the liquid phase epitaxy technique

摘要

The mechanical design, electronics and the control program developed in order to perform, automatically, the deposition of crystalline layers on substrates using the liquid phase epitaxy technique is described. The implementation of the system includes the hardware and control software of the substrate movements, the gas flow system, the temperature program and the monitoring of the main physical variables such as temperature, humidity, flow, pressure etc. The movement the substrate is done by means of a solenoid whose core is coupled to the slider of the graphite boat. This system was proposed in order to maintain the hermeticity of the system which is vital to achieve the epitaxial growth and to decrease the power of the electric motor that drives the solenoid.