Studies of optical and crystal properties of ALD grown ZnO

机译：ALD生长的ZnO的光学和晶体性质研究

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In this paper, we report structural and photoluminescence properties of ZnO thin films grown on single crystal ZnO substrates by means of Atomic Layer Deposition (ALD).

机译：在本文中，我们报告了通过原子层沉积（ALD）在单晶ZnO衬底上生长的ZnO薄膜的结构和光致发光特性。

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《2011 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS》|2011年|p.185-186|共2页
会议地点 Aix-en-Provence(FR)
作者
Elam David; Nemashkalo Anastasiia; Strzhemechny Yuri; Chonglin Chen; Ayon Arturo; Chabanov Andrey;
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Department of Physics and Astronomy, University of Texas San Antonio, One UTSA Circle, 78249, USA;

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原文格式 PDF
正文语种 eng
中图分类电机;
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4. Studies of optical and crystal properties of ALD grown ZnO [C] . Elam David, Nemashkalo Anastasiia, Strzhemechny Yuri, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS . 2011

机译：ALD生长ZnO的光学和晶体性能研究
5. Photoluminescence study of as-grown and thermally annealed bulk ZnO crystals. [D] . Wang, Lijun. 2004

机译：生长和热退火的块状ZnO晶体的光致发光研究。
6. Optical-Fiber Microsphere-Based Temperature Sensors with ZnO ALD Coating—Comparative Study [O] . Paulina Listewnik, Mikhael Bechelany, Paweł Wierzba, 2021

机译：基于光纤微球的温度传感器具有ZnO ALD涂层比较研究
7. A comprehensive study of structural and optical properties of ZnO bulk crystals and polycrystalline films grown by sol-gel method [O] . Ewelina Nowak, Miroslaw Szybowicz, Alicja Stachowiak, 2020

机译：通过溶胶 - 凝胶法生长ZnO散装晶体结构和光学性能的综合研究

Studies of optical and crystal properties of ALD grown ZnO

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