Reduced order modelling of MEMS dynamics

摘要

The dynamics of a uniaxial micro-accelerometer subjected to accidental drop events is studied by means of a reduced order model. A two degrees of freedom model is built, which carefully reproduces the MEMS response under high acceleration events. The results of the reduced order model are compared to those obtained with a three-dimensional finite element model, in terms of accuracy of the results and simulation speed-up