A micro-assembly station used for 3D reconfigurable hybrid MOEMS assembly

摘要

Micro-assembly has been identified to be a critical technology in the microsystems technology and nanotechnology. The increasing needs of MOEMS (Micro-Opto-Electro- Mechanical Systems) for the microsystems conducts to development of new concepts and skilled micro-assembly stations. This paper presents a 3D micro-assembly station used for the reconfigurable free space micro-optical benches (RFS-MOB) which are a promising type of MOEMS. The designed parts of RFS-MOB are assembled by using the developped micro-assembly station. Experimental results are shown and validate the effectiveness of the micro-assembly station and the micro-assembly strategies.