Experimental mechanical stress characterization of MEMS by using of confocal laser scanning microscope with a Raman spectroscopy interface

摘要

In this research, confocal laser scanning microscopes (CLS) interface for micro-Raman spectroscopy system has been developed. The potential of this system for characterization MEMS device is demonstrated by measuring Si membrane of a pressure sensor. Mechanical stress is obtained by a shift of Raman peak, and profile of deflection is measured by CLS at same time. The relationship mechanical stress and defection in a small scale MEMS is clearly shown.