Polymerlike C.H Thin Film Coating of Manopowders in Capacitively Coupled RF Discharge

摘要

Nanopowders of amorphous SiO_2, with typical particle sizes of 30-80 nm, were treated under non-equilibrium plasma conditions created by a capacitively coupled (CC) RF discharge in pure methane or ethane. The gas flow rate was varied between 0.02-0.06 slpm, with reactor pressures maintained between 1000 and 5000 Pa, and applied RF power inputs between 700 and 1500 W. The plasma properties were monitored through measurements of the C_2 rotational and the atomic hydrogen excitation temperatures. The compositions of the gases that passed through the plasma were analyzed by mass-spectrometry. In spite of the evidence indicating the presence of C_nH_(2n+2) and C_nH_(2n) (n=1-3) species, as well as acetylene, in the discharge, the homogeneous formation of soot was not observed. At the same time, introduced nanoparticles acted as centers for the inception and growth of C:H thin coatings in the form of polymer-like hydrocarbon layers, whose thickness lay between < 5 - 30 nm. The results of TEM, IR spectroscopy, thermo-gravimetric and precision calorimetric analyses performed on the plasma treated powders provided evidence for the formation of an amorphous, high density C:H matrix on particles' surfaces.