A 3D Geometry Modeler for the SUMMiT V MEMS Designer

摘要

This paper will describe the SUMMiT V 3D Modeler; a 3D geometric modeler based on Sandia National Laboratories new five-level process for manufacturing microelectromechanical systems (MEMS). The modeler simulates the SUMMiT V process, a baseline surface-micromachining process using low-stress polysilicon as its mechanical material. The resulting 3D model is an accurate representation of the MEMS device including artifacts like stringers and trapped oxide. The model can be used for visualization, analysis, dynamic modeling, rapid prototyping, etc. Several examples of the modeler are shown.