MECANISM DESIGN OF PRECISION LATHE INTEGRATED WIRING EQUIPMENT FOR ULTRA THIN METAL WIRE

摘要

Although the current wiring technology has been well developed for metal wire with diameter larger than about 20μm, there are some critical issues remained to be overcome for applications of precision mini-actuator used in precious watch, micro motor, micro generator and other micro electro-mechanical systems. Those issues include wire misalignment, overlapping and breaking. Regarding to the miniaturization trend of electro-mechanical micro-systems, wire diameter should be shrunk further to meet the product development. Therefore, precision wiring of metal wire with diameter less than about 20um will be the most important barrier for the emerging applications. In this study, a novel tension control mechanism has been proposed for this purpose. The design methodology of the ultra precision tension control mechanism is investigated thoroughly in this paper. The dynamic behavior of the fine metallic wire passing through the wire guide is simulated and further observed for verification. High sensitive tension control module based on four axis synchronous feedback, integrated with active closed loop control algorithm has been studied. The wiring process of 10 μm copper wire can be well controlled and aligned for large area through this innovative design. Besides, the influence of the relative humidity is also discussed about the misalignment phenomena. The reliability of the attached wiring mechanism is verified for both self-bonding and common copper wires.