AUTOMATED HEPA/ULPA FILTER SCANNING SYSTEM FOR LEAK DETECTION AND FILTER PERFORMANCE TESTING

摘要

An automated HEPA/ULPA filter leak testing and efficiency certification system is described. The system has all the components required to test filters and includes: an air plenum with a frame to accommodate filters of several dimensions, a high-output PSL generator, an air handling system with flow meters and pressure transducers, a dilutor for upstream PSL aerosol sampling, a XY scanning system with three iso-kinetic sampling probes, three laser particle counters, and a computer with the hardware and software required to control the operation of the system. The evaluation of the system components, the selection of appropriate test parameters, and test results of real filters are discussed.