Modeling A Piezoelectric Actuator Using A Transformer Equivalent Circuit

摘要

In this paper, we describe both the static and dynamic behaviors of an AFM-like piezoelectric actuator using a transformer equivalent circuit in which both the electrical and mechanical portions are represented by electrical equivalencies. The equivalent circuit is developed starting from electromechanical transduction principles and included in a commercial SPICE package. Analytical and simulated results are compared and found in good agreement both for static and dynamic analysis.